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FULL DESCRIPTION of Item 166286

in CMP Polishers
Item ID: 166286

Offered1 Offered at Best Price


Peter Wolters PM300 Apollo

300mm;two side / chambers; dry in dry out; 2 step polishing; with touch-up platen;
Polishing head: Wafer diameter 300 mm; Rotating speed 0 - 125 rpm; Backside pressure 0 - 200 kPa; Polishing downforce 300 - 4000 N 
Main polishing tables 1+2: Diameter  900 mm; Rotating speed 0 - 125 rpm; 
Temperature control  20 - 60 °C (Chiller);End Point Detection  Motorcurrent 
Secondary polishing table: Diameter  430 mm; Rotating speed 0 - 125 rpm; Temperature control  20 - 60 °C (Chiller)
Pad conditioner:Down force  0 - 350 N Disc diameter  120 mm Rotating speed  0 - 80 rpm  High pressure conditioning  0 - 100 bar 
SECS II  /  GEM, CIM

Unit Price Unstated
Number of Units 1
Manufacturer Peter Wolters AG
Model PM300 Apollo
Wafer Size Range 
  Minimum 300 mm
  Maximum 300 mm
  Set Size 300 mm
Cassette to Cassette YES
Number of Platens 2
Platen Diameter 35.43  in  (89.99 cm)
Pad Conditioning Between Runs
End of Process Detection Other
Controller Type PLC Controller Type
Recirculating Chiller 
  Chiller Included YES
Other Information 300mm;two side / chambers; dry in dry out; 2 step polishing; with touch-up platen;
Polishing head: Wafer diameter 300 mm; Rotating speed 0 - 125 rpm; Backside pressure 0 - 200 kPa; Polishing downforce 300 - 4000 N 
Main polishing tables 1+2: Diameter  900 mm; Rotating speed 0 - 125 rpm; 
Temperature control  20 - 60 °C (Chiller);End Point Detection  Motorcurrent 
Secondary polishing table: Diameter  430 mm; Rotating speed 0 - 125 rpm; Temperature control  20 - 60 °C (Chiller)
Pad conditioner:Down force  0 - 350 N Disc diameter  120 mm Rotating speed  0 - 80 rpm  High pressure conditioning  0 - 100 bar 
SECS II  /  GEM, CIM
Year of Manufacture 2003
Condition Very Good
Power Requirements 440 V     100.0 A     50 Hz     3 Phase
CE Marked YES
External Cooling Water Cooled
Exterior Dimensions 
  Width 280.315  in  (712.0 cm)
  Depth 62.992  in  (160.0 cm)
  Height 86.614  in  (220.0 cm)
Weight 24,250  lb  (11,000 kg)
Serial Number(s)3024

Shipping & Handling:

All Items are sold FCA Infineon location excluding packaging and delivery. We are not responsible for any damage incurred during shipment.
 
Payment:

100% downpayment