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FULL DESCRIPTION of Item 177582

in Other Semiconductor Manufacturing Equipment
Item ID: 177582

Offered1 Offered at Best Price


Sumitomo Laser Anneal

The main function of this System is to rapidly anneal semiconductor substrates using laser beam energy in order to recover defect crystals generated by pre-process such as ion implantation.The System is composed of Solid-state laser units, processing station, control devices, transfer robot and other accessory facilities.

Although this system has been designed and manufactured so that it delivers the safety conforming to IEC 60825-1:2001, Safety of laser products-Part1: Equipment classification, requirements and user’s guide, the laser unit used in this system corresponds to a lass 4 laser product.

Sumitomo Laser Anneal
Unit Price Unstated
Number of Units 1
Manufacturer Sumitomo Heavy Indus
Model SWA-90GD
Description Laser Anneal System
Condition Very Good
Year of Manufacture 2010
Power Requirements 208 V     50 Hz     3 Phase
Exterior Dimensions 
  Width 57.087  in  (145.0 cm)
  Depth 175.591  in  (446.0 cm)
  Height 90.551  in  (230.0 cm)
Weight 8,221  lb  (3,729 kg)
click to view document at right in new windowSWA-90GD
Serial Number(s)YYXH0083

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