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FULL DESCRIPTION of Item 199835

in Horizontal Diffusion Furnaces
Item ID: 199835

Offered 1 Offered at Best Price


Kokusai Furnance BDF41

4 Tubes
Tube 1      Oxid
Tube 2+3  Teos
Tube 4      Poly
Kokusai Furnance BDF41
  Click to see additional image(s)... other images
Unit Price Unstated
Number of Units 1
Manufacturer Kokusai
Model BDF41
Wafer Size Range 
  Minimum 100 mm
  Maximum 200 mm
  Set Size 200 mm
Number of Furnace Tubes 4
Furnace Tube #1:
Process Oxid,
Gas System 
  Gas Input Control Mass Flow Controllers
Furnace Tube #2:
Process Teos
Gas System 
  Gas Input Control Mass Flow Controllers
Furnace Tube #3:
Process Teos
Gas System 
  Gas Input Control Mass Flow Controllers
Furnace Tube #4:
Process Poly
Gas System 
  Gas Input Control Mass Flow Controllers
Other Information Tool is in production.
Power Requirements 380 V     350.0 A     50 Hz     3 Phase
CE Marked YES
Year of Manufacture 2001
Condition Excellent
Serial Number(s)DSVA-28

Shipping & Handling:

All Items are sold FCA Infineon location excluding packaging and delivery. We are not responsible for any damage incurred during shipment.
 
Payment:

100% downpayment