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FULL DESCRIPTION of Item 137536

in Cluster Plasma Tools - Oxide
Item ID: 137536

Offered1 Offered at Best Price


TEL Certas WING

TEL Certas WING
300mm TEL Certas WING mainframe with 3 load ports
Equipment Code: ETC380-41


300mm TEL Certas WING mainframe with 3 load ports
Serial Number: WM0002
TEL Certas WING
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Unit Price Unstated
Number of Units 1
Manufacturer Tokyo Electron Ltd
Model TEL Certas WING for 12" / 300 mm
Wafer Size Range 
  Set Size 300 mm
Number of Chambers 2
Chamber 1 Description TEL Certas isotropic Oxide etch chamber
Manufactured in 2008
Chamber 2 Description TEL Certas isotropic Oxide etch chamber
Manufactured in 2008
Year of Manufacture 2008
Condition Very Good
Exterior Dimensions 
  Width 168.307  in  (427.5 cm)
  Depth 69.685  in  (177.0 cm)
  Height 86.220  in  (219.0 cm)
Weight 8,818  lb  (4,000 kg)
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Serial Number(s)WM0002