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in Benchtop LPVCD Furnaces
Item ID: 137540

Offered 1 Offered at Best Price

Aviza Pantheon Mainframe

Aviza Pantheon Mainframe
Equipment Code: CVD304-03

Aviza Pantheon Mainframe with 3 chambers
Serial Number: OX0412-005
Aviza Pantheon Mainframe
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Unit Price Unstated
Number of Units 1
Manufacturer Aviza Technology Ltd
Model Aviza Pantheon Mainframe for 12" / 300 mm
Furnace Tube #2:
Gas System 
  Gas Input Control 
Wafer Size Range 
  Set Size 300 mm
Accessories Mainframe with 3 Chambers:
3 x Aviza Pantheon ALD chamber
Tool Codes:
Tool Code: CVD304-03-B,
Tool Code: CVD304-03-C &
Tool Code: CVD304-03-E
Power Requirements  V
Year of Manufacture 2004
Condition Very Good
Exterior Dimensions 
  Width 82.677  in  (210.0 cm)
  Depth 131.496  in  (334.0 cm)
  Height 103.937  in  (264.0 cm)
Weight 3,086  lb  (1,400 kg)
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Serial Number(s)OX0412-005