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FULL DESCRIPTION of Item 137546

in Cluster PECVD Tools
Item ID: 137546

Offered1 Offered at Best Price


TEL Trias TI/TiN-ALD

TEL Trias TI/TiN-ALD
Equipment Code: CVD314-02


TEL Trias TI/TiN-ALD
Serial Number: C13503
TEL Trias TI/TiN-ALD
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Unit Price Unstated
Number of Units 1
Manufacturer Tokyo Electron Ltd
Model TEL Trias TI/TiN-ALD for 12" / 300 mm
Wafer Size Range 
  Set Size 300 mm
Number of Chambers 4
Chamber 1 Description TiN chamber
Manufactured in 2008
Chamber 2 Description TiN chamber
Manufactured in 2008
Chamber 3 Description TiN chamber
Manufactured in 2008
Chamber 4 Description TiN chamber
Manufactured in 2008
Accessories Mainframe with 4 Chambers:
x TiN chamber
Tool Codes:
CVD314-02-A
CVD314-02-B
CVD314-02-C
CVD314-02-D
Year of Manufacture 2008
Condition Very Good
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Serial Number(s)C13503